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Scholarly work

Publications

Publications from the PLASMA group, ordered from most recent to earliest.

  1. September 3, 2026 · JVST-A

    Selective physisorption ALD-like process and selective PECVD process for smoothing metal organic resist using SO2

    Nicolas Maldonado Pinos, Van Long Nguyen, Christophe Valleé, Gregory Denbeaux

    View DOI

  2. September 1, 2026 · JVST-A

    Integrating area-selective catalytic PMMA etching with PMMA-inhibited area-selective deposition of HfO2

    Enzo Novoselic, Natalya Tokranova, Christophe Valleé

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  3. May 19, 2026 · Surface Science Spectra

    Core-level high-resolution XPS spectra of trimethylsilyl-functionalized SiO2 surfaces

    Anthony Valenti, Christophe Valleé, et al.

    View DOI